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Vacuum Devices/진공 호환 장치
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Vacuum Devices/진공 호환 장치

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진공 환경에서 사용 가능한 고정밀 모터 구동 리니어 스테이지 및 액추에이터. 고진공(10⁻⁶ Torr)과 저진공(10⁻³ Torr) 호환 모델 제공. 내장 컨트롤러 탑재로 정밀 제어 가능. RS-232 통신 지원 및 다양한 이동 거리 옵션 제공.

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LK Labkorea

LK Labkorea · Vacuum Devices/진공 호환 장치

Vacuum Devices (진공 호환 장치)

Vacuum Devices는 진공 환경에서 사용 가능한 고정밀 모터 구동 리니어 스테이지 및 액추에이터로, 두 가지 제품군으로 구성됩니다.

  1. High Vacuum Devices
  2. Low Vacuum Devices

각 제품군의 주요 특징은 아래 설명을 참조하십시오.


High Vacuum Devices

Cat. No. Model Description
M01-680-530 X-LRQ075AL-SV2-KX14P High vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed
M01-680-535 X-LRQ150AL-SV2-KX14P High vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-540 X-LRQ300AL-SV2-KX14P High vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed
M01-680-545 X-LRQ450AL-SV2-KX14P High vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed
M01-680-550 X-LRQ600AL-SV2-KX14P High vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed
M01-680-555 X-LSM025A-SV2-KX14P High vacuum, motorized linear stage, 25 mm travel, integrated controller, fine resolution, low speed
M01-680-560 X-LSM050A-SV2-KX14P High vacuum, motorized linear stage, 50 mm travel, integrated controller, fine resolution, low speed
M01-680-565 X-LSM100A-SV2-KX14P High vacuum, motorized linear stage, 100 mm travel, integrated controller, fine resolution, low speed
M01-680-570 X-LSM150A-SV2-KX14P High vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-575 X-LSM200A-SV2-KX14P High vacuum, motorized linear stage, 200 mm travel, integrated controller, fine resolution, low speed
M01-680-580 T-NA08A25-SV2-KT03X06P High vacuum linear actuator, 25 mm travel, RS-232
M01-680-585 T-NA08A50-SV2-KT03X06P High vacuum linear actuator, 50 mm travel, RS-232

High Vacuum Devices Specification

X-LRQ-SV2
X-LSM-SV2

Specification X-LRQ-SV2 Series X-LSM-SV2 Series T-NA-SV2 Series
Feature High vacuum motorized linear stages with built-in controllers High vacuum miniature motorized linear stages with built-in controllers High vacuum micro linear actuators with built-in controllers
Built-in Controller Yes Yes Yes
Repeatability < 2.5 µm <1 ~ 4 µm < 1 µm
Communication Interface RS-232 RS-232 RS-232
Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber Binary
Maximum Centered Load 1000 N 100 N 46 N
Maximum Cantilever Load 3000 N·cm 300 N·cm
Guide Type Recirculating Ball Linear Guide Needle roller bearing
Maximum Current Draw 1200 mA 350 mA 350 mA
Power Supply 24–48 VDC 24–48 VDC 12–16 VDC
Power Plug None, use X-PIB None, use X-PIB None, use T-DSUB9-P
Motor Steps Per Rev 200 200 200
Data Cable Connection Teflon flying leads with M8 4 pin M/F Teflon flying leads with M8 4 pin M/F Teflon flying leads with Minidin 6 pin M/F
Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw
Limit or Home Sensing Magnetic home sensor Magnetic hall sensor Magnetic hall sensor
Manual Control No No No
Axes of Motion 1 1 1
LED Indicators Yes Yes Yes, Bi-colour
Mounting Interface M6 and M3 threaded holes M3 and M6 threaded holes and M4 threaded center hole 3/8-32 nut, 3/8` shank, or M3 screws
Vacuum Compatible High vacuum (10⁻⁶ Torr) High vacuum (10⁻⁶ Torr) High vacuum (10⁻⁶ Torr)
Operating Temperature Range 0–50 °C 0–50 °C 0–50 °C
RoHS Compliant Yes Yes Yes
CE Compliant Yes Yes Yes
Travel Range 75–600 mm 25.4–203.2 mm 25.4 or 50.8 mm
Accuracy 15–150 µm 8–61 µm 15 or 30 µm
Maximum Speed 35–205 mm/s 24–100 mm/s 8 mm/s
Peak Thrust 60–100 N 15–35 N 46 N

Low Vacuum Devices

Cat. No. Model Description
M01-680-600 X-LRQ075AL-SV1-KX14P Low vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed
M01-680-605 X-LRQ150AL-SV1-KX14P Low vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-610 X-LRQ300AL-SV1-KX14P Low vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed
M01-680-615 X-LRQ450AL-SV1-KX14P Low vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed
M01-680-620 X-LRQ600AL-SV1-KX14P Low vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed
M01-680-625 X-LSM025A-SV1-KX14P Low vacuum, motorized linear stage, 25 mm travel, integrated controller, fine resolution, low speed
M01-680-630 X-LSM050A-SV1-KX14P Low vacuum, motorized linear stage, 50 mm travel, integrated controller, fine resolution, low speed
M01-680-635 X-LSM100A-SV1-KX14P Low vacuum, motorized linear stage, 100 mm travel, integrated controller, fine resolution, low speed
M01-680-640 X-LSM150A-SV1-KX14P Low vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed
M01-680-645 X-LSM200A-SV1-KX14P Low vacuum, motorized linear stage, 200 mm travel, integrated controller, fine resolution, low speed
M01-680-650 T-NA08A25-SV1-KT03X06P Low vacuum linear actuator, 25 mm travel, RS-232
M01-680-655 T-NA08A50-SV1-KT03X06P Low vacuum linear actuator, 50 mm travel, RS-232

Low Vacuum Devices Specification

Specification X-LRQ-SV1 Series X-LSM-SV1 Series T-NA-SV1 Series
Feature High vacuum motorized linear stages with built-in controllers High vacuum miniature motorized linear stages with built-in controllers High vacuum micro linear actuators with built-in controllers
Built-in Controller Yes Yes Yes
Repeatability < 2.5 µm <1 ~ 4 µm < 1 µm
Communication Interface RS-232 RS-232 RS-232
Communication Protocol Zaber ASCII (Default), Zaber Binary Zaber ASCII (Default), Zaber Binary Zaber Binary
Maximum Centered Load 1000 N 100 N 46 N
Maximum Cantilever Load 3000 N·cm 300 N·cm
Guide Type Recirculating Ball Linear Guide Needle roller bearing
Maximum Current Draw 1200 mA 350 mA 350 mA
Power Supply 24–48 VDC 24–48 VDC 12–16 VDC
Power Plug None, use X-PIB None, use X-PIB None, use T-DSUB9-P
Motor Steps Per Rev 200 200 200
Data Cable Connection Teflon flying leads with M8 4 pin M/F Teflon flying leads with M8 4 pin M/F Teflon flying leads with Minidin 6 pin M/F
Mechanical Drive System Precision lead screw Precision lead screw Precision lead screw
Limit or Home Sensing Magnetic home sensor Magnetic hall sensor Magnetic hall sensor
Manual Control No No No
Axes of Motion 1 1 1
LED Indicators Yes Yes Yes, Bi-colour
Mounting Interface M6 and M3 threaded holes M3 and M6 threaded holes and M4 threaded center hole 3/8-32 nut, 3/8` shank, or M3 screws
Vacuum Compatible Low vacuum (10⁻³ Torr) Low vacuum (10⁻³ Torr) Low vacuum (10⁻³ Torr)
Operating Temperature Range 0–50 °C 0–50 °C 0–50 °C
RoHS Compliant Yes Yes Yes
CE Compliant Yes Yes Yes
Travel Range 75–600 mm 25.4–203.2 mm 25.4 or 50.8 mm
Accuracy 15–150 µm 8–61 µm 15 or 30 µm
Maximum Speed 35–205 mm/s 24–100 mm/s 8 mm/s
Peak Thrust 60–100 N 15–35 N 46 N

제품 이미지

High Vacuum Device Specification 1
High Vacuum Device Specification 2
High Vacuum Device Specification 3
Low Vacuum Device Specification 1
Low Vacuum Device Specification 2
Low Vacuum Device Specification 3

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