Vacuum Devices/진공 호환 장치

■ Vacuum Devices(진공 호환 장치)는 2가지 제품군으로 분류

1. High Vacuum Devices
2. Low Vacuum Devices
   ■ 제품별 주요 특징은 하단 설명 참조

• High Vacuum Devices

• High Vacuum Devices Specification

Specification
---	---	---	---
Value	Value	Value
---	---	---	---
Model	X-LRQ-SV2 Series	X-LSM-SV2 Series	T-NA-SV2 Series
Feature	High vacuum motorized linear stages with built-in controllers	High vacuum miniature motorized linear stages with built-in controllers	High vacuum micro linear actuators with built-in controllers
Built-in Controller	Yes	Yes	Yes
Repeatability	< 2.5 µm	<1 ~4 um	< 1 µm
Communication Interface	RS-232	RS-232	RS-232
Communication Protocol	Zaber ASCII (Default), Zaber Binary	Zaber ASCII (Default), Zaber Binary	Zaber Binary
Maximum Centered Load	1000 N	100 N	46 N
Maximum Cantilever Load	3000 N-cm	300 N-cm
Guide Type	Recirculating Ball Linear Guide	Needle roller bearing
Maximum Current Draw	1200 mA	350 mA	350 mA
Power Supply	24-48 VDC	24-48 VDC	12-16 VDC
Power Plug	None, useX-PIB	None, useX-PIB	None, use T-DSUB9-P
Motor Steps Per Rev	200	200	200
Data Cable Connection	Teflon flying leads with M8 4 pin M/F	Teflon flying leads with M8 4 pin M/F	Teflon flying leads with Minidin 6 pin M/F
Mechanical Drive System	Precision lead screw	Precision lead screw	Precision lead screw
Limit or Home Sensing	Magnetic home sensor	Magnetic hall sensor	Magnetic hall sensor
Manual Control	No	No	No
Axes of Motion	1	1	1
LED Indicators	Yes	Yes	Yes, Bi-colour
Mounting Interface	M6 and M3 threaded holes	M3 and M6 threaded holes and M4 threaded center hole	3/8-32 nut, 3/8` shank, or M3 screws
Vacuum Compatible	High vacuum (10-6Torr)	High vacuum (10-6Torr)	High vacuum (10-6Torr)
Operating Temperature Range	0 to 50 degrees C	0 to 50 degrees C	0 to 50 degrees C
RoHS Compliant	Yes	Yes	Yes
CE Compliant	Yes	Yes	Yes
Tranvel Range	75 ~ 600 mm	25.4 ~ 203.2 mm	25.4 or 50.8 mm
Accuracy	15 ~ 150 um	8 ~ 61 um	15 or 30 um
Maximum Speed	35 ~ 205 mm/s	24 ~ 100 mm/s	8 mm/s
Peak Thrust	60 ~100 N	15 ~35 N	46 N

• Low Vacuum Devices

• Low Vacuum Devices Specification

Specification
---	---	---	---
Value	Value	Value
---	---	---	---
Model	X-LRQ-SV1 Series	X-LSM-SV1 Series	T-NA-SV1 Series
Feature	High vacuum motorized linear stages with built-in controllers	High vacuum miniature motorized linear stages with built-in controllers	High vacuum micro linear actuators with built-in controllers
Built-in Controller	Yes	Yes	Yes
Repeatability	< 2.5 µm	<1 ~4 um	< 1 µm
Communication Interface	RS-232	RS-232	RS-232
Communication Protocol	Zaber ASCII (Default), Zaber Binary	Zaber ASCII (Default), Zaber Binary	Zaber Binary
Maximum Centered Load	1000 N	100 N	46 N
Maximum Cantilever Load	3000 N-cm	300 N-cm
Guide Type	Recirculating Ball Linear Guide	Needle roller bearing
Maximum Current Draw	1200 mA	350 mA	350 mA
Power Supply	24-48 VDC	24-48 VDC	12-16 VDC
Power Plug	None, useX-PIB	None, useX-PIB	None, use T-DSUB9-P
Motor Steps Per Rev	200	200	200
Data Cable Connection	Teflon flying leads with M8 4 pin M/F	Teflon flying leads with M8 4 pin M/F	Teflon flying leads with Minidin 6 pin M/F
Mechanical Drive System	Precision lead screw	Precision lead screw	Precision lead screw
Limit or Home Sensing	Magnetic home sensor	Magnetic hall sensor	Magnetic hall sensor
Manual Control	No	No	No
Axes of Motion	1	1	1
LED Indicators	Yes	Yes	Yes, Bi-colour
Mounting Interface	M6 and M3 threaded holes	M3 and M6 threaded holes and M4 threaded center hole	3/8-32 nut, 3/8` shank, or M3 screws
Vacuum Compatible	High vacuum (10-3Torr)	High vacuum (10-3Torr)	High vacuum (10-3Torr)
Operating Temperature Range	0 to 50 degrees C	0 to 50 degrees C	0 to 50 degrees C
RoHS Compliant	Yes	Yes	Yes
CE Compliant	Yes	Yes	Yes
Tranvel Range	75 ~ 600 mm	25.4 ~ 203.2 mm	25.4 or 50.8 mm
Accuracy	15 ~ 150 um	8 ~ 61 um	15 or 30 um
Maximum Speed	35 ~ 205 mm/s	24 ~ 100 mm/s	8 mm/s
Peak Thrust	60 ~100 N	15 ~35 N	46 N